combo-sm logo

Main Page

Table of Contents


 

General Information

Undergraduate Studies

Graduate Studies

Research

Continuing Education & Training Programs

Appendix: Personnel & Enrollment

 

trio guitar2 director
undergrad
 Electronics Engineering Courses (EENG)
SPNavLeft SPNavRight SPNavUp

EENG

415

Integrated Circuit Fabrication: Materials and Processes

3 cr

Prerequisite: EENG 316. Offered occasionally.
Microfabrication techniques for silicon very large integrated circuits (VLSI), unit processes including lithography, native film growth, diffusion, ion implantation, thin film deposition and etching. Metal interconnects. Process integration for CMOS, BiCMOS, ECL and MEMS.
 

SPNavLeft SPNavRight SPNavUp

© 2002-2003, The American University in Cairo