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Appendix: Personnel & Enrollment
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EENG
415
Integrated Circuit Fabrication: Materials and Processes
3 cr
Prerequisite: EENG 316. Offered occasionally.
Microfabrication techniques for silicon very large integrated circuits (VLSI), unit processes including lithography, native film growth, diffusion, ion implantation, thin film deposition and etching. Metal interconnects. Process integration for CMOS, BiCMOS, ECL and MEMS.