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Appendix: Personnel & Enrollment
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PHYS
417
Process Instrumentation
3 cr
Prerequisites: PHYS 315. Offered ins spring.
Transduction mechanisms: Transduction based on changes in electromagnetic fields, piezoelectricity and pyroelectricity; transduction based on changes in energy dissipation, optomechanical sensors; linear inductive transduction.
Sensors: Force, pressure and infrared sensors, accelerometers, gyroscopes, flow sensors. Fabrication technology: Lithography, deposition and etching technologies, surface and bulk micromachining, LIGA, packaging.