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General Information

Undergraduate Studies

Graduate Studies

Research

Continuing Education & Training Programs

Appendix: Personnel & Enrollment

 

1A3B7900 1A3B8362 1A3B8052
undergrad
 Electronics Engineering Courses (EENG)
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EENG

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415

Integrated Circuit Fabrication: Materials and Processes

Prerequisite: EENG 316. Offered occasionally.
Microfabrication techniques for silicon very large integrated circuits (VLSI), unit processes including lithography, native film growth, diffusion, ion implantation, thin film deposition and etching. Metal interconnects. Process integration for CMOS, BiCMOS, ECL and MEMS.
 

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3 cr.

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